核心参数

Product Description

The Nano-SPMZ integrates single axis micropositioning and high resolution nanopositioning into a compact unit which is compatible with optical tables and standard mounting accessories. Stepper motor driven coarse positioning over 25mm can produce a minimum step size of 95nm. An optional high resolution linear encoder incorporated into the coarse positioning stage continuously monitors positions down to 20nm. Nanopositioning over 30 microns provides the ultimate positioning resolution of 60 picometers with the stability of the proprietary PicoQ^? position feedback sensors. The USB digital interface provides direct PC control of the micropositioner and nanopositioner as well as access to the linear encoder and position sensor inside the nanopositioner.

Technical Specifications
Micropositioner
Range of motion	25 mm
Micoropositioning step size	95 nm
Maximum speed	4 mm/sec
Motion Profile
Motion > 500 steps	Automatic accel/decel control
Motion ≤ 500 steps	Constant 1 step/ms
Linear encoder resolution (optional)	20 nm
Body material	Aluminum
Controller	MicroDrive?
Computer interface	Bidirectional USB
Nanopositioner
Range of motion (nanopositioner)	30 μm
Maximum resolution (nanopositioner)	0.06 nm
Resonant frequency (nanopositioner)	4kHz ±20%
Resonant frequency (nanopositioner, 100g load)	2kHz ±20%
Resonant frequency (100g load)	2 kHz ±20%
Stiffness	3.0 N/μm ±20%
Recommended max load (horizontal)*	1.0 kg
Recommended max load (vertical)*	0.5 kg
Body material	Aluminum
Controller	Nano-Drive^?
Computer interface	USB
* Larger load requirements should be discussed with our engineering staff.