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Features
 | Typical Applications
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Product Description |
The Nano-METZ is a compact z-axis nanopositioning system designed for high speed scanning and ultra-low noise characteristics for demanding AFM and metrology applications. The innovative design of the Nano- METZ coupled with our proprietary PicoQ® sensor technology yields a resonant frequency of 14.5kHz and a noise floor of 400 femtometers/√Hz. The result: unparalled speed, response and precision for the most demanding and discerning metrology applications. Related products include the Nano-MET2, Nano-MET3, Nano- MET10 and Nano-MET20 nanopositioning systems. |
Technical Specifications | |
| Range of motion | 5 μm |
| Resolution | 0.005 nm |
| Resonant Frequency | 14.5 kHz |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Aluminum or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum | ||
| The Nano-METZ demonstrates less than 400 femtometers of position noise. Click below to enlarge and view the data for all three axes. | ||
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Additional Information | |
Nano-METZ Drawing | Nano-METZ Catalog Pages |
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