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Features
 | Typical Applications
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Product Description |
The Nano-M250 is a compact, two axis nanopositioning system constructed from titanium or invar. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The 0.5” center aperture provides a convienent optical pathway or feedthrough for probe assemblies. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models. |
Technical Specifications | |
| Range of motion (XY) | 50 μm x 50 μm |
| Resolution | 0.1 nm |
| Resonant Frequency (X) | 1.0 kHz ±20% |
| Resonant Frequency (Y) | 700 Hz ±20% |
| Stiffness | 1.0 N/μm |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-M250 Drawing | Nano-M250 Catalog Pages |
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