平台参数
Automated Stage Assembly
• High Precision Linear Drive Stage
• X and Y Movement
• Total travel: 100, 150, or 200 mm
• Accuracy: +/-200 nm per axis
• Repeatability: +/- 50 nm per axis
• Z Movement
• Total travel: 25 mm
• Accuracy: +/- 200 nm
• Repeatability: +/- 75 nm
• Theta Movement
• Total travel: 360 degrees
• Accuracy: +/-5 arc sec
• Repeatability: +/-2 arc sec