heliOpticsTM WLI5 - Compact Mirau-Interferometer Module
The heliOpticsTM WLI5 is a component-level 3D-metrology solution for machine builders. Its compact dimensions, small weight, and robust optical design enable innovative interferometer configurations and cost effective system integration.
With a vertical resolution down to nanometers and lateral resolutions down to 0.8 micrometers, the WLI5 is particularly suited for high-precision surface characterization and for measuring geometrical features such as step heights, co-planarity or flatness with extreme accuracy.
In combination with Heliotis' ultrafast heliCamTM C3, as well as a range of interchangeable lenses, turn-key 3D- metrology is available in custom-tailored configurations. As the fastest scanning white-light interferometer, the WLI5/C3 configuration is ideally suited for the inspection of electronic components and packages, micro-mechanics, MEMS, micro-optics or semiconductors.
Features
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Specifications
WLI5 Module
| WLI interferometer | Mirau configuration, exchangeable objectives (10x, 20x, 50x) | ||
| light source | high power LED | ||
| field of view (*) | 232x222 μm | 580x556 μm | 1160x1112 μm |
| numerical aperture | 0.5 | 0.4 | 0.3 |
| working distance | 2.52 mm | 3.57 mm | 3.57 mm |
vertical resolution (*) (single meas., RMS) | 50 nm 1 nm in phase mode | 70 nm 1 nm in phase mode | 100 nm 1nm in phase mode |
| vertical scan speed (*) | up to 50 mm per second | ||
| lateral resolution (* | 0.8 μm | 2 μm | 4 μm |
| reflectivity of sample (*) | < 0.1% to 100% | ||
Companion Modules
| heliCam™ C3 | high-speed camera with the latest heliSense™ S3 CMOS sensor developed by Heliotis featuring in-pixel signal demodulation at up to 1 million images per second and on-camera surface extraction. |
| lens tube | imaging optics with f=200mm, C-mount |
| Z-stage | linear stage with optical encoder and advanced servo controller |
| heliSDK™ | software development kit for C++, Python and LabView 2013, macros (ImageJ) (scanner control, 3D-camera configuration and readout, data processing algorithms) |
| custom components | Heliotis designs and produces application specific optics and mechanical components |
