| Measuring head | |
| Image acquisition module |
Fast digital camera with progressive scan technology, up to 55fps, 512 x 512 Pixel, 10 Bit, Firewire |
| light source, adjustable | High efficiency LED, (λ=505nm), MTBF:50.000h |
| Scan modules | |
| x, y-axis module MS 50 | Precision x, y-table, 50 x 50mm, resolution 0.3μm |
| z-axis module ZN 75 | Precision scanning module, range 75mm, resolution 0.2μm |
| z-axis module NV 250 |
Fast precision scanning module (piezo), measuring range 250μm, resolution < 10nm |
| Optic modules | 1600 S | 800 L / S / XS | 320 L / S / XS | 260 XS |
| Magnification | 10 x | 20 x | 50 x | 60 x |
| Measurement area (x/y)(μm)2 (XY测量范围) | 1600 x 1600 | 800 x 800 | 320 x 320 | 260 x 260 |
| Numerical aperture(NA值) | 0.3 | 0.4 / 0.45 / 0.6 | 0.5 / 0.8 / 0.95 | 0.9 |
|
Working distance(mm) Z方向测量范围 |
11.0 | 12.1 / 3.1 / 0.9 | 10.6 / 1.0 / 0.3 | 0.4 |
| Resolution in z-direction(nm)(Z方向范围分辨率) | 20 | 6 / 5 / 4 | 4 / 2 / 2 | 2 |
|
Resolution in x,y-direction (XY分辨率) (μm) |
3.1 | 1.6 | 0.7 | 0.5 |
| L : long working distance, S : normal working distance, XS : short working distance | ||||
