KLA-Tencor Candela CS光学表面分析仪

技术参数：
Candela CS1 SPECIFICATIONS
Substrate
Sizes: 2 in. – 200 mm diameter*
*Other sizes may be available on request
Thickness: 350 μm – 1,100 μm
Material: Any opaque, polished surface which scatters
≥ 10% of incident light
Any clear, polished substrate which scatters ≥ 10% of incident light
Defect Sensitivity
0.3 μm diameter PSL sphere equivalent ≥ 95% capture rate
(PSL on bare Si)
Other Defects and Applications
Defect Types: Particles, scratches, stains, pits, and bumps.
Classification accuracy and minimum
detectable sizes depend on optical
signatures of defects.
Sensitivity: Minimum detectable size for automatic
defect classification:
- Scratches: 100 μm long, 0.1 μm wide,
50 Å deep
- Pits: 20 μm diameter, 50 Å deep
- Stains: 20 μm diameter, 10 Å thick
Note: Defect signal must be more than 3x background P-V signal