Umberto Celano is a Senior Scientist at imec (Belgium), with expertise in materials analysis for semiconductor technology, device physics and nanoscale functional materials. He received his Ph.D. in Physics from the University of Leuven - KU Leuven (Belgium) in 2015. His research has established a novel three-dimensional nanoscale imaging technique that combines sensing with sub-nm material removal to study materials in confined volumes. Currently, Dr. Celano’s research interests encompass nanoelectronics, nanophotonic, functional materials and VLSI metrology. In these areas, he conducted research in various institutions including KU Leuven, Osaka University and Stanford University.
第二届SPM纳米科学中国论坛 （NSSC 2020）
报告：Invited talk: Electrical AFM for Nanoelectronics<br>特邀报告：电子原子力显微镜纳米电子学研究
Next generation nanoelectronics for logic and memory are based on devices increasingly smaller, more three-dimensional in shape and containing even more types of materials. Therefore, the evaluation of nanometre-scale materials properties, including carrier profiling, strain, electrical and chemical sensing, becomes essential for a deep interpretation of device’s functionalities. Here, I will present the broad role played by scanning probe microscopies for the characterization of state-of-the-art CMOS devices with emphasis on dopant and carrier profiling as studied by two- and three-dimensional methods.