Deggendorf Institute of Technology, Germany,
Günther Benstetter received the doctorate degree in electrical engineering from Technical University of Munich, Germany, in 1994. He joined Siemens AG in Munich and the IBM/Siemens/Toshiba DRAM development project in Essex Junction, VT, USA, in 1995. Dr. Benstetter was appointed Professor at the Deggendorf Institute of Technology in Deggendorf, Germany, in 1998 and is head of the Institute of Quality and Materials Analysis. His research interests are in the fields of thin films, electronic materials and reliability and failure analysis of semiconductor devices. He has contributed to more than 80 publications and has co-organized several international conferences.
第二届SPM纳米科学中国论坛 （NSSC 2020）
报告：Invited talk: Recent Trends in Characterization of Nanoelectronic Materials and Devices with Scanning Probe Microscopy<br>特邀报告：使用扫描探针显微镜表征纳米电子材料和器件的最新趋势
The presentation discusses recent applications of established Scanning Probe Microscopy (SPM) methods and new developments for the characterization of nanoelectronic materials and devices. The contribution includes various methods of Conductive Atomic Force Microscopy (C-AFM) as well as Scanning Capacitance Microscopy (SCM) based techniques, Kelvin Probe Force Microscopy (KPFM) and Scanning Thermal Microscopy (SThM). Case studies for the characterization of different materials and systems and related measurement artifacts are presented. Finally, the presentation discusses combined methods, extending the field of application of selected SPM-based characterization techniques.