经净化后达到99.9999%,其中O2小于0.1ppm,N2小于0.2ppm,H2小于0.1ppm,H2O小于0.2ppm,CO小于0.1ppm,CO2小于0.1ppm,CH4小于0.1ppm
经净化后达到99.9999%,其中O2小于0.1ppm,N2小于0.2ppm,H2小于0.1ppm,H2O小于0.2ppm,CO小于0.1ppm,CO2小于0.1ppm,CH4小于0.1ppm
经净化后达到99.9999%,其中O2小于0.1ppm,N2小于0.2ppm,H2小于0.1ppm,H2O小于0.2ppm,CO小于0.1ppm,CO2小于0.1ppm,CH4小于0.1ppm
最多添加5台