日本Elionix 新型ELS-BODEN 电子束光刻系统

NEW ELS-BODEN Electron Beam Lithography System

新型ELS-BODEN 电子束光刻系统

ELS Series

ELS-BODEN ó
Fastest in the industry!

业内最快!
High speed scanning at 400MHz clock frequency for production

高速扫描400MHz频率生产

Key Product Features

关键产品特性Fastest in the industry!

• The industry's fastest 400 MHz high speed scanning

业界最快的400mhz高速扫描
High speed beam scanning, 4 times faster than our previous products.

高速光束扫描，比我们以前的产品快4倍。
High current and narrow beam pitch, which was not possible until now.

大电流和窄波束间距，这是不可能的，直到现在。
The new system achieves faster and higher quality writing. It is ideal for the MPWS (field-polymerized writing). 
新系统实现更快和更高质量的刻写。它是MPWS(现场聚合刻写)的理想选择。
• Faster stage speed

阶段的速度更快
Redesigned the stage to meet the demands of production applications and achieved higher speeds.

重新设计了工作台，以满足生产应用的要求，并实现了更高的速度。

• Inherits traditional Elionix technology

继承了传统的Elionix技术
150kV/125kV if the ultra-fine patterns are most important. 

150kV/125kV如果超细图案是最重要的。
100 kV for common system and wide variety of applications

100kv用于普通系统和广泛的应用
50 kV for high speed writing for the production.

50kv用于高速写作，用于生产。
It can meet user's several requirements.

能满足用户多方面的要求。

Specification 规格参数：