获取电话扫描电镜测长物质常见的有两种，一种线宽标准物质，一种粒度标准物质。线宽标准物质以单晶硅为基底，表面刻制金属膜（钨或者钛）。周期性的线宽标准物质主要用于校准扫描电镜放大倍率和进行长度的比对。
l 安装在样品台上，快速核对空间尺寸
l 定期进行显微镜的刻度和性能检查
l 第一时间获得高放大倍率和sub-micron-scale
l 精确获得从0.3um到30um的尺寸，仅用一个刻度参照物
l 分析变形失真原因
基本参数：
301CE & 701CE | 302CE & 702CE | 301BE** | |
Substrate | Silicon Wafer | Silicon Wafer | Silicon Wafer |
Top Surface | 60 nm Tungsten film | 60 nm Tungsten film | Ti pattern on Si |
Physical Size | 3mm x 4mm x 0.5mm | 3mm x 4mm x 0.5mm | 3mm x 4mm x 0.5mm |
Accuracy | ± 3% | ± 3% | ± 1% |
Nominal Dimensions | (x) | (x, y) | (x) |
300 nm for 301CE | 300 nm for 302CE | 300 nm for 301BE | |
700 nm for 701CE | 700 nm for 702CE | ||
Availability | mounted or unmounted* | mounted or unmounted* | mounted or unmounted* |
订购信息：
货号 | 产品名称 | 规格 |
80110-31 | MODEL 301CE SUBMICRON STANDARD UNMOUNTED | 个 |
80110-31M | MODEL 301CE SUBMICRON STANDARD - MOUNTED | 个 |
80110-31-PIN | MODEL 301CE WITH PIN | 个 |
80110-32 | MODEL 302CE SUBMICRON STANDARD-UNMOUNTED | 个 |
80110-32M | MODEL 302CE SUBMICRON STANDARD - MOUNTED | 个 |
80110-32-PIN | MODEL 302CE WITH PIN | 个 |
80110-71 | MODEL 701CE SUBMICRON STANDARD, UNMOUNTED | 个 |
80110-71M | MODEL 701 CE SUBMICRON STANDARD-MOUNTED | 个 |
80110-71-PIN | MODEL 701CE WITH PIN | 个 |
80110-72 | MODEL 702CE SUBMICRON STANDARD,UNMOUNTED | 个 |
80110-72M | MODEL 702CE SUBMICRON STANDARD-MOUNTED | 个 |
80110-72-PIN | MODEL 702CE WITH PIN | 个 |
80111-31 | MODEL 301BE SUBMICRON STANDARD-UNMOUNTED | 个 |
80111-31M | MODEL 301BE SUBMICRON STANDARD - MOUNTED | 个 |
80111-31-PIN | MODEL 301BE WITH PIN | 个 |
请联系海德公司获取详细产品信息。
