台阶仪在三维形貌表征领域的应用

Stylus-based surface profiling is a standard technique for accurate, repeatable surface shape, topography and step height measurement in applications ranging from semiconductor R&D to solar cell QC. In recent years, the ability to map surfaces in 3D has greatly increased the capability of stylus profilers; yet despite such recent advancements, it is not uncommon in cutting-edge fabs, solar cell companies, industrial manufacturing facilities, colleges, universities and various research institutes to see R&D, QC and process monitoring operations performed still using technologies developed over sixty years ago.

Dektak® stylus profilers provide accurate, high resolution measurement of surface shape and texture. The heart of a Dektak system is its measurement stylus, which runs over the surface as the sample is moved beneath it on the stage. A variety of stylus shapes and sizes are available to optimize measurement for particular applications. This paper describes the variety of styli that are currently available from Veeco, and guidelines for choosing the optimal tips for your application.

Understanding surface texture requires both accurate assessment of the surface profile and the proper analytical functions to characterize the surface. Dektak stylus profilers provide both, with low-force, high precision scanning and a comprehensive set of analytical functions and filters to make the most of scan data. For more on surface texture analysis, please review the excellent sources shown below.

Dektak stylus profilers measure steps and roughness with exceptional repeatability and accuracy. Because of their excellent performance, researchers and quality professionals rely upon Dektak profiler data to guide product and process design, and to maintain process performance for higher yields. As with all precision instruments, subtle changes to the stylus and/or the environment can affect the instrument’s performance over time. Regular calibration to traceable standards ensures a high level of performance. This article describes the procedures for checking and updating the calibration of a Dektak stylus profiler to maintain long-term accuracy and repeatability.