Features
| Typical Applications
|
Product Description |
The Nano-M3Z is a compact, three axis (Z, θX , θY) nanopositioning system with a 0.25” center aperture. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The center aperture provides an optical path for laser interferometry or tracking. Nano-M3Z’s can be constructed from aluminum or from invar to reduce themal expansion effects. A related model, the Nano-Man5, adds linear X and Y motion to the the Z-axis capabilities of the Nano-M3Z. |
Technical Specifications | |
Range of motion (Z) | 25 μm |
Range of motion (θX) | 1 mradian |
Range of motion (θY) | 1 mradian |
Resolution (Z) | 0.05 nm |
Resolution (θX) | 2 nradian |
Resolution (θY) | 2 nradian |
Resonant Frequency | 700 Hz ±20% |
Stiffness | 1.0 N/μm |
Recommended max. load (horizontal)* | 0.5 kg |
Recommended max. load (vertical)* | 0.2 kg |
Body Material | Aluminum or Invar |
Controller | Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |
Additional Information | |
Nano-M3Z Drawing | Nano-M3Z Catalog Pages |
Related Products |
MCL关注纳米位移台Nano-M3Z的工作原理介绍
位移台Nano-M3Z的使用方法?
MCL关注纳米Nano-M3Z多少钱一台?
位移台Nano-M3Z可以检测什么?
位移台Nano-M3Z使用的注意事项?
MCL关注纳米Nano-M3Z的说明书有吗?
MCL关注纳米位移台Nano-M3Z的操作规程有吗?
MCL关注纳米位移台Nano-M3Z报价含票含运吗?
MCL关注纳米Nano-M3Z有现货吗?
最多添加5台