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Features
 | Typical Applications
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Product Description |
The Nano-M3Z is a compact, three axis (Z, θX , θY) nanopositioning system with a 0.25” center aperture. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The center aperture provides an optical path for laser interferometry or tracking. Nano-M3Z’s can be constructed from aluminum or from invar to reduce themal expansion effects. A related model, the Nano-Man5, adds linear X and Y motion to the the Z-axis capabilities of the Nano-M3Z. |
Technical Specifications | |
| Range of motion (Z) | 25 μm |
| Range of motion (θX) | 1 mradian |
| Range of motion (θY) | 1 mradian |
| Resolution (Z) | 0.05 nm |
| Resolution (θX) | 2 nradian |
| Resolution (θY) | 2 nradian |
| Resonant Frequency | 700 Hz ±20% |
| Stiffness | 1.0 N/μm |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Aluminum or Invar |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-M3Z Drawing | Nano-M3Z Catalog Pages |
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