Nanonex光刻机/紫外光刻机
Nanonex Lumina-200 Stand-Alone High Resolution Photolithography/Aligner.
Lumina series offers a high quality, reliable, and cost effective solution for high-resolution, accurate alignment, contact and proximity photolithography in electronic, optoelectronic, MEMS, and many other applications. It has a user friendly interface, high precision stages, high performance optics, and small foot print.