高速电子束闸Beamblanker

Features
The XENOS XeSwitch beam blanker uses electrostatic blanking plates and a high speed high voltage blanking amplifier to allow fast beam blanking for lithography or other applications.
As well, it is equipped with a Faraday cup and picoamperemeter to allow precise beam current measurements directly at the beam within the electron optical column.
The blanker head with blanking plates is positioned at the beam axes by a piezo drive within the vacuum chamber of the blanker, thus no mechanical feedtroughs to the vacuum of the column are needed .
With the ability to position the blanker at either the blanking or Faraday cup position, it is as well possible to fully retract the blanker from the beam axes in order to provide zero beam influence during observation mode.

Specifications
Blanker Modes: Blanking, PCD functionality, retracted
Rise- and falltime: 25 ns
Blanking electrodes: Titanium, 0.4 mm gap
Interface: fibre optic or TTL for blanking pulse, USB for control
Maximum electron energy: 30 keV