电镜专用自动清洁度分析系统---牛津仪器AZtecFeature

Introduction Application Note As semiconductor devices continue to decrease in size to improve performance and take advantage of advances in fabrication techniques, there is a need to analyse both their structure and chemistry at ever increasing resolution. Typically this requires the use of TEM for metrology and failure analysis. Using ultrahigh resolution FEG-SEM, low kV imaging and the new X-Max® Extreme EDS detector we demonstrate the ability to retain some of this high resolution analysis in the SEM. This allows for better targeting of resources and increased throughput of analysis.

Development and testing of semiconductor devices requires extensive knowledge of local structure and elemental composition. With feature sizes of <5 nm, it is often necessary to perform imaging and EDS analysis in a S / TEM. Once in the TEM, there are still many difficulties to be overcome to acquire accurate elemental maps. Elemental analysis of semiconductors is typically difficult due to strong overlaps of X-ray lines between commonly used elements and low concentrations of dopants. Not only are concentrations of dopants small but their X-ray lines often overlap with other materials used in semiconductor processing. This brief shows how AZtecTEM solves these overlaps to achieve an accurate elemental analysis. TEM Semiconductor Mapping in the TEM Solving peak overlaps in real-time Application Brief

For many materials, the truly important is how they perform and behave under the conditions that they are likely to be exposed to during their use-lifetime. This may be the application of stresses and strains in construction materials, the dielectric properties of ceramics or the corrosion resistance of materials as they are exposed to a variety of atmospheric conditions.

Abstract. This study investigates the changes in radial micro-texture via Kearn’s f-factors during single cold pilger reduction of a titanium Ti-3-2.5 alloy as a result of strain path changes from tooling modifications. EBSD results confirm that the texture intensity as well as the radial f-factors can be increased by modifications of pilgering tooling. In addition a switch between the secondary prism planes which lie normal to the pilger direction in the starting tube to primary prism planes after pilgering has been observed. Material and Experimental The tubes investigated were made from Ti alloy 3Al 2.5V, they were manufactured via hot extrusion and then cold pilgered. The cold pilger process configuration is schematically shown in Figure 1. Two strain paths, shown in the ‘Q‘ factor chart in Figure 2, were used in the manufactiure: texture minimised and texture maximised. They were annealed at 750oC before being cold pilgered and for this investigation they were stress relieved at 530oC for 2 hours prior to EBSD examination. Specimens were extracted from two regions either side of the reduced tube as shown in the schematic Figure 2, mounted in conductive Bakelite and polished mechanically for EBSD examination. The final polish was carried out using vibratory polishes using a mixture of 5:2 colloidal silica, hydrogen peroxide mixture. EBSD examination was conducted using a FEGSEM and OI EBSD Nordlys detector and AZtec Software.

The properties and uses of many polymers can be modified by varying their formulation and by the use of additives.

Summary Impurities and contaminants in the material used in the production of Li-ion batteries can have catastrophic impacts on the finished products. As such, monitoring of the quality and cleanliness of materials throughout the production process is essential if contaminants are to be found and their sources controlled. This monitoring must start with the raw materials produced at the mine and continue through to the final battery grade powders. This application note demonstrates a scanning electron microscopy (SEM) based solution for automatic detection and identification of impurities in battery raw material powders. By taking samples at different steps of the production process it is possible to identify where contaminants are introduced; thereby allowing sources to be identified and solutions developed.

Lithium Ion batteries are found in most mobile electronic devices (e.g. laptop computers, phones etc).

An important part of the research and development of thin-film solar cells is the characterisation of microstructural and compositional properties of the functional layers. For this purpose, energy-dispersive X-ray spectrometry (EDS) and electron backscatter diffraction (EBSD) represent techniques which exhibit spatial resolutions on the nanometer scale but can be, at the same time, applied on large areas of several square millimeters. The application of EDS and EBSD is demonstrated on this example of thin-film solar cells with Cu(In,Ga)Se2 absorber layers. While EDS provides elemental distributions even in layers with a nominal thickness of 30-50 nm, EBSD gives not only information of average grain sizes, local orientations and grain boundaries. Moreover, strain distributions within individual grains can be calculated by the evaluation of EBSD patterns recorded on individual grains.

The growth and manufacture of nanomaterials and nanostructure is fundamentally different to traditional top down manufacturing. Nanowires and 2D materials such as Graphene, MoS2 and hBN are grown by a catalytic self-assembly process and can be used to enhance current devices and build new device architectures.

A detailed measurement of porosity, connectivity and fluid content is fundamental to the evaluation of a rock’s reservoir potential.

Mineral liberation is a critical stage in the production of high quality mineralogical concentrates from their ores. The products (concentrates) must be of a suitable degree of purity for the downstream processes in which they will be used. The original mined ore must be processed via comminution (crushing, grinding and classification) to liberate the desired minerals from it and via concentration (froth flotation, gravity separation, magnetic separation) to enrich the mineral content to the desired level. In order to design, diagnose, monitor and optimise the process, information is needed on the extent to which the valuable mineral grains have been released from the accompanying gangue minerals (degree of liberation) and to which form they are lost in tailings (deportment studies).